Abstract: For compensating imaging of LiDAR,the disciplines of the LiDAR point cloud accuracy deviation caused by motion error of airborne LiDAR were advanced.The coordinate expressions of the LiDAR point cloud were deduced for the parallel lines scan LiDAR,the Z-shaped scan LiDAR and the elliptical scan LiDAR.The relationship mapping of the parameters of LiDAR system and the coordinates of LiDAR point cloud were discussed in detail.Further for analyzing the coordinates accuracy of the LiDAR point cloud based on the parallel lines scan LiDAR,five motion errors were discussed.The results show that the rank of the impact factor from the max to the mix are as follows,the roll deviation,the pitch deviation,the yaw deviation,the vertical shake deviation and the instantaneous velocity deviation.It will offer a theory foundation for improving resolution of imaging of LiDAR through mechanical compensating.