高精度正立方玻璃体干涉检测方案设计

Interferometric Test Scheme of Highly Precise Regular Glass Cube

摘要: 锥体棱镜作为各种测距仪的附件,属高精度光学元件,且其精度高低对测距仪测距精度影响很大。不少生产厂家在加工中普遍采用先加工出一个正立方体,而后在顶角处斜切出锥体棱镜的加工方法。本文详细讨论了用干涉法检测正立方体各项质量指标,特别提出了利用封闭多边形内角之和恒定的原理消除干涉系统的系统误差,从而使对二面直角的测量可达极高精度。

Abstract: An interferometric method is designed for testing the highly precise regular cube, from which a corner prism reflector is cut. The testing scheme and principle are introduced and some related issues such as parameters' selection and attainable accuracies are investigated.