Abstract: In the paper, on the basis of known major atmospheric parameters, for example, air and underground temperature, amount of raintall, etc, how to use the method of time series analysis to process the data of observation across fault is emphatically disscussed. Through two practicality, detailed research about constructon of mixd linear regression equation, the relation between the model equation and the earthqake anomaly, processing and analysis of the observational data with possibly has anomaly is made. Besides, the grey dynamic data model that the residual is adjusted by GM (1,1) is given.Through practicality, it indicates that the metod mentioned will show its advautages in data proessing of deformation measurements across fault.