用于光学薄膜测量的导波光学方法与分光光度技术的比较研究

Guided Wave Method for Characterization of Thin Films as Compared to Wideband Spectrophotometric Method

  • 摘要: 通过对导波光学和分光光度法的实验比较研究,证明了导波光学技术在测量光学薄膜特征参数方面的可靠性及其良好精度。

     

    Abstract: The guided wave method for characterization of thin films is compared experimentally with wideband spectrophotometric method.This proves the reliability and high precision of the guided wave method.

     

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