Abstract: According to the fact that InSAR has the advantages of the high spatial resolution while GPS has the advantages of the high precision and high time resolution, we discuss the method of obtaining high precision three-dimensional deformation field by integrating both ascending and descen-ding orbits InSAR data and GPS data. To weaken the influence of the remaining systematic errors in InSAR data, an integrated deformation analysis model with additional systematic parameters is established, where systematic error functions related to the position of observed points are added in both ascending and descending orbits InSAR observation equations under the constraint of high accurate GPS observations. The simulated and practical examples show that the proposed method can identify systematic error in InSAR data effectively and the calculation is simple. As a result, the three-dimensional deformation field with a higher accuracy will be established by the method proposed in this paper.