Abstract: Provenance technology can query the sources of Synthetic Aperture Radar (SAR) data products, assess the quality and the reliability and reproduce the production process by recording and managing the derivation history of SAR data products. A bi-graph describes the relationship between data and process in the SAR data processing flow. Hence, a Hierarchical BiGraph Provenance Model (HBPM) is proposed in this paper that combines the characteristics of the SAR data processing flow with a bi-graph. Based on the HBPM, the provenance repository and the retrieval language PDQL (Provenance Data Query Language, PDQL) were designed and applied. Process reconstruction and the provenance information visualization were also implemented. The feasibility of the proposed method was verified through a case study on provenance of SAR Data Processing Flow——using Small Baselines Subset (SBAS) technology to monitor surface deformation in the surface subsidence montitoring system of Jiangsu Province.